3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

Authors

  • Baofa Hu Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China; Shenzhen Research Institute of Xiamen University, Shenzhen 518000, China
  • Zhiwei Li Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China; Shenzhen Research Institute of Xiamen University, Shenzhen 518000, China
  • Yuanjie Wan School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China; Shenzhen Research Institute of Xiamen University, Shenzhen 518000, China
  • Peng Zhou Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China; Shenzhen Research Institute of Xiamen University, Shenzhen 518000, China
  • Chunquan Zhang Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China
  • Haisheng San Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China; School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China; Shenzhen Research Institute of Xiamen University, Shenzhen 518000, China

DOI:

https://doi.org/10.2478/msr-2021-0011

Keywords:

surface acoustic wave, 3D printing, gas pressure sensor, LiNbO3

Abstract

This paper reports a 3-dimentional (3D) pressure sensor based on surface acoustic wave (SAW) resonators. The SAW resonators were designed and fabricated on 128°Y-X LiNbO3 substrate using the MEMS technology. The pressure sensing structure was 3D-printed using polyactic acid plastic, and two SAW resonators were integrated in the 3D-printed chamber structure for both temperature and pressure sensing. The SAW-based gas pressure sensors demonstrate a sensitivity of 589 ppm/MPa at the pressure range of 100-600 kPa and temperature of 40 °C.

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Published

24.06.2021

How to Cite

Hu, B., Li, Z., Wan, Y., Zhou, P., Zhang, C., & San, H. (2021). 3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator. Measurement Science Review, 21(3), 76–81. https://doi.org/10.2478/msr-2021-0011

Issue

Vol. 21 No. 3 (2021): Measurement Science Review

Section

Articles

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